ý ׿׽

ý ׿׽

ǰ

 

CLEAN ROOM Ģ

AIR CLEAN UNIT

AIR SHOWER

CLEAN BENCH

CLEAN BOOTH

PASS BOX

HEPA FILTER UNIT

AIR FILTER

RELIEF DAMPER

 

 

 

 

 

air filter

ȿ (%)

Ư ¡

߷ TEST

NBS TEST

DOP TEST

PRE FILTER

92 ~ 99

30 ~ 85

15 ~ 50

, ,

߼ FILTER
(MEDIUM)

100

93 ~ 97

80 ~ 85

Ұ, 1~10

߱, ߱

HEPA FILTER
()

100

100

99.97

Ұ,0.3,

ݰ, ũ

ܱ

99

85 ~ 90

60 ~ 70

, ݰ,

̿ܿ ó Ÿ ȭ Ȱ FILTER ȿ 70~90% ̸ 꼺 ȭ Ÿ ϸ ϰ ̴.

 

 

Ÿódz

 

1)MEDIUM FILTER (BAG TYPE)


SIZE(inch)

CMM

mmAQ

FACE AREA

6POCKET
90~95%

24*24*15

20

ʱ 12.5

25

2.8

24*24*21

32

4.2

24*24*29

44

5.9

8 POCKET
90~95%

24*24*15

28

ʱ 16

30

3 ~ 75

24*24*21

42

5.2

24*24*29

56

7.2

10 POCKET
90~95%

24*24*15

34

ʱ 18

35

4.6

24*24*21

50

6.6

24*24*29

70

9

 

 

2)MEDIUM FILTER (RIGID TYPE)

SIZE

CMM

mmAQ

ȿ %

NBS

DOP

600*300*150

14

15 ~ 30

95

90

600*300*300

25

15 ~ 30

95

90

600*300*150

28

15 ~ 30

95

90

600*300*300

51

15 ~ 30

95

90